Makoto Miura, Junichi Fujikata, Masataka Noguchi, Yasuhiko Arakawa. Ultra-small butt-joint Ge photodetector featuring self-aligned in-situ doping and CMP-free novel CVD process. In Optical Fiber Communications Conference and Exhibition, OFC 2014, San Francisco, CA, USA, March 9-13, 2014. pages 1-3, IEEE, 2014. [doi]
Abstract is missing.