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Design of a positioning device using piezo element and investigation of a simple compensation method

Kazuto Miyawaki, Kazuhiko Chiba, Hiromi Isobe. Design of a positioning device using piezo element and investigation of a simple compensation method. In 2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015, Nagoya, Japan, November 23-25, 2015. pages 1-7, IEEE, 2015. [doi]

Authors

Kazuto Miyawaki

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Kazuhiko Chiba

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Hiromi Isobe

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