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Thermoelectric thick film patterns formed by using thermally-assisted sputtering method and silicone lift-off masks

Mizue Mizoshiri, Masashi Mikami, Kimihiro Ozaki, Mitsuhiro Shikida, Seiichi Hata. Thermoelectric thick film patterns formed by using thermally-assisted sputtering method and silicone lift-off masks. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2013, Nagoya, Japan, November 10-13, 2013. pages 1-3, IEEE, 2013. [doi]

Authors

Mizue Mizoshiri

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Masashi Mikami

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Kimihiro Ozaki

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Mitsuhiro Shikida

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Seiichi Hata

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