Mizue Mizoshiri, Masashi Mikami, Kimihiro Ozaki, Mitsuhiro Shikida, Seiichi Hata. Thermoelectric thick film patterns formed by using thermally-assisted sputtering method and silicone lift-off masks. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2013, Nagoya, Japan, November 10-13, 2013. pages 1-3, IEEE, 2013. [doi]
Abstract is missing.