Jun Mizuno, Sharon Farrens, Viorel Dragoi, Thomas Glinsner, Hiroyuki Ishida, Hidetoshi Shinohara, Takafumi Suzuki, Masanori Ishizuka, Shuichi Shoji. Cyclo-Olefin Polymer Direct Bonding Using low Temperature Plasma Activation Bonding. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 346-352, IEEE Computer Society, 2005. [doi]
@inproceedings{MizunoFDGISSIS05,
title = {Cyclo-Olefin Polymer Direct Bonding Using low Temperature Plasma Activation Bonding},
author = {Jun Mizuno and Sharon Farrens and Viorel Dragoi and Thomas Glinsner and Hiroyuki Ishida and Hidetoshi Shinohara and Takafumi Suzuki and Masanori Ishizuka and Shuichi Shoji},
year = {2005},
doi = {10.1109/ICMENS.2005.37},
url = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.37},
researchr = {https://researchr.org/publication/MizunoFDGISSIS05},
cites = {0},
citedby = {0},
pages = {346-352},
booktitle = {2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada},
publisher = {IEEE Computer Society},
isbn = {0-7695-2398-6},
}