Fabrications of Micro-Channel Device by Hot Emboss and Direct Bonding of PMMA

Jun Mizuno, T. Harada, Thomas Glinsner, Masanori Ishizuka, Tomohiko Edura, Ken Tsutsui, Hiroyuki Ishida, Shuichi Shoji, Yasuo Wada. Fabrications of Micro-Channel Device by Hot Emboss and Direct Bonding of PMMA. In 2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada. pages 26-29, IEEE Computer Society, 2004. [doi]

Abstract

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