A crab leg suspension based dual axis MEMS accelerometer with low cross axis sensitivity

Zakriya Mohammed, Alabi Bojesomo, Waqas A. Gill, Ibrahim Abe M. Elfadel, Mahmoud Rasras. A crab leg suspension based dual axis MEMS accelerometer with low cross axis sensitivity. In IEEE 59th International Midwest Symposium on Circuits and Systems, MWSCAS 2016, Abu Dhabi, United Arab Emirates, October 16-19, 2016. pages 1-4, IEEE, 2016. [doi]

Abstract

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