Z. Moktadir, H. Wensink, M. Kraft. Analytical model of micromachining of brittle materials with sharp particles. Microelectronics Journal, 36(3-6):608-611, 2005. [doi]
@article{MoktadirWK05,
title = {Analytical model of micromachining of brittle materials with sharp particles},
author = {Z. Moktadir and H. Wensink and M. Kraft},
year = {2005},
doi = {10.1016/j.mejo.2005.02.082},
url = {http://dx.doi.org/10.1016/j.mejo.2005.02.082},
researchr = {https://researchr.org/publication/MoktadirWK05},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {36},
number = {3-6},
pages = {608-611},
}