F. Monforte, M. Camalleri, D. Calì, G. Currò, E. Fazio, F. Neri. Nitrogen bonding configurations near the oxynitride/silicon interface after oxynitridation in N::2::O ambient of a thin SiO::2:: gate. Microelectronics Reliability, 47(4-5):822-824, 2007. [doi]
@article{MonforteCCCFN07,
title = {Nitrogen bonding configurations near the oxynitride/silicon interface after oxynitridation in N::2::O ambient of a thin SiO::2:: gate},
author = {F. Monforte and M. Camalleri and D. Calì and G. Currò and E. Fazio and F. Neri},
year = {2007},
doi = {10.1016/j.microrel.2007.01.037},
url = {http://dx.doi.org/10.1016/j.microrel.2007.01.037},
researchr = {https://researchr.org/publication/MonforteCCCFN07},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {47},
number = {4-5},
pages = {822-824},
}