Shota Monno, Yoshifumi Kamada, Hiroyoshi Miwa, Koji Ashida, Tadaaki Kaneko. Detection of Defects on SiC Substrate by SEM and Classification Using Deep Learning. In Fatos Xhafa, Leonard Barolli, Michal Gregus, editors, Advances in Intelligent Networking and Collaborative Systems, The 10th International Conference on Intelligent Networking and Collaborative Systems (INCoS-2018), Bratislava, Slovakia, September 5-7, 2018. Volume 23 of Lecture Notes on Data Engineering and Communications Technologies, pages 47-58, Springer, 2018. [doi]
Abstract is missing.