Laurent Montès, Lionel Palun, Panagiota Morfouli, Nathalie Mathieu, Nadine Guillemot, Sandrine Descheneaux, Jean-Michel Terrot, Christophe Malhaire. Micro-System Process for Education: Fabrication of a Pressure Sensor. In 2001 International Conference on Microelectronics Systems Education (MSE 2001), 17-18 July 2001, Las Vegas, NV, USA. pages 91, IEEE Computer Society, 2001. [doi]
Abstract is missing.