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Implementation and evaluation of the Level Set method: Towards efficient and accurate simulation of wet etching for microengineering applications

C. Montoliu, Néstor Ferrando, M. A. Gosálvez, J. Cerdá, R. J. Colom. Implementation and evaluation of the Level Set method: Towards efficient and accurate simulation of wet etching for microengineering applications. Computer Physics Communications, 184(10):2299-2309, 2013. [doi]

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