Vibration Control With MEMS Electrostatic Drives: A Self-Sensing Approach

Steven Ian Moore, S. O. Reza Moheimani. Vibration Control With MEMS Electrostatic Drives: A Self-Sensing Approach. IEEE Trans. Contr. Sys. Techn., 23(3):1237-1244, 2015. [doi]

Abstract

Abstract is missing.