Thermal approach of defects generation on copper/organic dielectric interface due to SEM inspections

L. Dantas de Morais, F. Allanic, F. Roqueta, J. P. Rebrasse. Thermal approach of defects generation on copper/organic dielectric interface due to SEM inspections. Microelectronics Reliability, 47(9-11):1614-1618, 2007. [doi]

@article{MoraisARR07,
  title = {Thermal approach of defects generation on copper/organic dielectric interface due to SEM inspections},
  author = {L. Dantas de Morais and F. Allanic and F. Roqueta and J. P. Rebrasse},
  year = {2007},
  doi = {10.1016/j.microrel.2007.07.056},
  url = {http://dx.doi.org/10.1016/j.microrel.2007.07.056},
  tags = {systematic-approach},
  researchr = {https://researchr.org/publication/MoraisARR07},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {47},
  number = {9-11},
  pages = {1614-1618},
}