CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology

Jose Luis Muñoz-Gamarra, Arantxa Uranga, Nuria Barniol. CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology. Micromachines, 7(2):30, 2016. [doi]

Abstract

Abstract is missing.