An Outlook on Potentialities and Limits in Using Epitaxial Polysilicon for MEMS Real-Time Clocks - researchr publication authors

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Giorgio Mussi, Marco Bestetti, Valentina Zega, Attilio Frangi, Gabriele Gattere, Giacomo Langfelder. An Outlook on Potentialities and Limits in Using Epitaxial Polysilicon for MEMS Real-Time Clocks. IEEE Transactions on Industrial Electronics, 67(8):6996-7004, 2020. [doi]

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