An Outlook on Potentialities and Limits in Using Epitaxial Polysilicon for MEMS Real-Time Clocks

Giorgio Mussi, Marco Bestetti, Valentina Zega, Attilio Frangi, Gabriele Gattere, Giacomo Langfelder. An Outlook on Potentialities and Limits in Using Epitaxial Polysilicon for MEMS Real-Time Clocks. IEEE Transactions on Industrial Electronics, 67(8):6996-7004, 2020. [doi]

@article{MussiBZFGL20,
  title = {An Outlook on Potentialities and Limits in Using Epitaxial Polysilicon for MEMS Real-Time Clocks},
  author = {Giorgio Mussi and Marco Bestetti and Valentina Zega and Attilio Frangi and Gabriele Gattere and Giacomo Langfelder},
  year = {2020},
  doi = {10.1109/TIE.2019.2938465},
  url = {https://doi.org/10.1109/TIE.2019.2938465},
  researchr = {https://researchr.org/publication/MussiBZFGL20},
  cites = {0},
  citedby = {0},
  journal = {IEEE Transactions on Industrial Electronics},
  volume = {67},
  number = {8},
  pages = {6996-7004},
}