MEMS real-time clocks based on epitaxial polysilicon: system-level requirements and experimental characterization

Giorgio Mussi, P. Frigerio, Giacomo Langfelder, Gabriele Gattere. MEMS real-time clocks based on epitaxial polysilicon: system-level requirements and experimental characterization. In 2020 IEEE Sensors, Rotterdam, The Netherlands, October 25-28, 2020. pages 1-4, IEEE, 2020. [doi]

Abstract

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