Microstructure simulation of grain growth in Cu through silicon vias using phase-field modeling

Nabi Nabiollahi, Nele Moelans, Mario Gonzalez, Joke De Messemaeker, Christopher J. Wilson, Kristof Croes, Eric Beyne, Ingrid De Wolf. Microstructure simulation of grain growth in Cu through silicon vias using phase-field modeling. Microelectronics Reliability, 55(5):765-770, 2015. [doi]

Abstract

Abstract is missing.