Shuichi Nagasawa, Kenji Hinode, Tetsuro Satoh, Mutsuo Hidaka, Hiroyuki Akaike, Akira Fujimaki, Nobuyuki Yoshikawa, Kazuyoshi Takagi, Naofumi Takagi. Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation. IEICE Transactions, 97-C(3):132-140, 2014. [doi]
@article{NagasawaHSHAFYTT14,
title = {Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation},
author = {Shuichi Nagasawa and Kenji Hinode and Tetsuro Satoh and Mutsuo Hidaka and Hiroyuki Akaike and Akira Fujimaki and Nobuyuki Yoshikawa and Kazuyoshi Takagi and Naofumi Takagi},
year = {2014},
url = {http://search.ieice.org/bin/summary.php?id=e97-c_3_132},
researchr = {https://researchr.org/publication/NagasawaHSHAFYTT14},
cites = {0},
citedby = {0},
journal = {IEICE Transactions},
volume = {97-C},
number = {3},
pages = {132-140},
}