Master-slave control with hysteresis inversion for dual-stage nanopositioning systems

William S. Nagel, Garrett M. Clayton, Kam K. Leang. Master-slave control with hysteresis inversion for dual-stage nanopositioning systems. In 2016 American Control Conference, ACC 2016, Boston, MA, USA, July 6-8, 2016. pages 655-660, IEEE, 2016. [doi]

Authors

William S. Nagel

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Garrett M. Clayton

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Kam K. Leang

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