Koji Nakamae, Masaki Chikahisa, Hiromu Fujioka. Estimation of electron probe profile from SEM image through wavelet multiresolution analysis for inline SEM inspection. Image Vision Comput., 25(7):1117-1123, 2007. [doi]
@article{NakamaeCF07,
title = {Estimation of electron probe profile from SEM image through wavelet multiresolution analysis for inline SEM inspection},
author = {Koji Nakamae and Masaki Chikahisa and Hiromu Fujioka},
year = {2007},
doi = {10.1016/j.imavis.2006.07.024},
url = {http://dx.doi.org/10.1016/j.imavis.2006.07.024},
tags = {analysis},
researchr = {https://researchr.org/publication/NakamaeCF07},
cites = {0},
citedby = {0},
journal = {Image Vision Comput.},
volume = {25},
number = {7},
pages = {1117-1123},
}