Photodiode dopant structure with atomically flat Si surface for high-sensitivity and stability to UV light

Taiki Nakazawa, Rihito Kuroda, Yasumasa Koda, Shigetoshi Sugawa. Photodiode dopant structure with atomically flat Si surface for high-sensitivity and stability to UV light. In Ralf Widenhorn, Valérie Nguyen, Antoine Dupret, editors, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIII, Burlingame, California, USA, January 22-26, 2012. Volume 8298 of SPIE Proceedings, SPIE, 2012. [doi]

Abstract

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