Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Fumihiko Nakazawa, Takeaki Shimanouchi, Tadashi Nakatani, Takashi Katsuki, Hisao Okuda, Osamu Toyoda, Satoshi Ueda. Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam. In Mitsumasa Koyanagi, Morihiro Kada, editors, 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012. pages 1-5, IEEE, 2011. [doi]

This author has not been identified. Look up 'Fumihiko Nakazawa' in GoogleThis author has not been identified. Look up 'Takeaki Shimanouchi' in GoogleThis author has not been identified. Look up 'Tadashi Nakatani' in GoogleThis author has not been identified. Look up 'Takashi Katsuki' in GoogleThis author has not been identified. Look up 'Hisao Okuda' in GoogleThis author has not been identified. Look up 'Osamu Toyoda' in GoogleThis author has not been identified. Look up 'Satoshi Ueda' in Google

runs on WebDSL