Fumihiko Nakazawa, Takeaki Shimanouchi, Tadashi Nakatani, Takashi Katsuki, Hisao Okuda, Osamu Toyoda, Satoshi Ueda. Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam. In Mitsumasa Koyanagi, Morihiro Kada, editors, 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012. pages 1-5, IEEE, 2011. [doi]
@inproceedings{NakazawaSNKOTU11,
title = {Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam},
author = {Fumihiko Nakazawa and Takeaki Shimanouchi and Tadashi Nakatani and Takashi Katsuki and Hisao Okuda and Osamu Toyoda and Satoshi Ueda},
year = {2011},
doi = {10.1109/3DIC.2012.6263007},
url = {http://dx.doi.org/10.1109/3DIC.2012.6263007},
researchr = {https://researchr.org/publication/NakazawaSNKOTU11},
cites = {0},
citedby = {0},
pages = {1-5},
booktitle = {2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012},
editor = {Mitsumasa Koyanagi and Morihiro Kada},
publisher = {IEEE},
isbn = {978-1-4673-2189-1},
}