Indirectly Reactive Sputtering Coater for High Quality Optical Coatings

Kei-ichi C. Namiki, Xinbin Cheng, Haruo Takahashi. Indirectly Reactive Sputtering Coater for High Quality Optical Coatings. IEICE Transactions, 91-C(10):1673-1674, 2008. [doi]

Authors

Kei-ichi C. Namiki

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Xinbin Cheng

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Haruo Takahashi

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