Indirectly Reactive Sputtering Coater for High Quality Optical Coatings

Kei-ichi C. Namiki, Xinbin Cheng, Haruo Takahashi. Indirectly Reactive Sputtering Coater for High Quality Optical Coatings. IEICE Transactions, 91-C(10):1673-1674, 2008. [doi]

Abstract

Abstract is missing.