Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants

Kambiz Nanbakhsh, Riina Ritasalo, Wouter A. Serdijn, Vasiliki Giagka. Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants. In 42nd Annual International Conference of the IEEE Engineering in Medicine & Biology Society, EMBC 2020, Montreal, QC, Canada, July 20-24, 2020. pages 3436-3439, IEEE, 2020. [doi]

@inproceedings{NanbakhshRSG20,
  title = {Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants},
  author = {Kambiz Nanbakhsh and Riina Ritasalo and Wouter A. Serdijn and Vasiliki Giagka},
  year = {2020},
  doi = {10.1109/EMBC44109.2020.9176103},
  url = {https://doi.org/10.1109/EMBC44109.2020.9176103},
  researchr = {https://researchr.org/publication/NanbakhshRSG20},
  cites = {0},
  citedby = {0},
  pages = {3436-3439},
  booktitle = {42nd Annual International Conference of the IEEE Engineering in Medicine & Biology Society, EMBC 2020, Montreal, QC, Canada, July 20-24, 2020},
  publisher = {IEEE},
  isbn = {978-1-7281-1990-8},
}