Electrostatic-Capacitive MEMS Stiffness Sensor with Position-Feedback Mechanism

Alessandro Nastro, Marco Ferrari 0002, Vittorio Ferrari. Electrostatic-Capacitive MEMS Stiffness Sensor with Position-Feedback Mechanism. In 2021 IEEE Sensors, Sydney, Australia, October 31 - Nov. 3, 2021. pages 1-4, IEEE, 2021. [doi]

Authors

Alessandro Nastro

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Marco Ferrari 0002

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Vittorio Ferrari

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