Electrostatic-Capacitive MEMS Stiffness Sensor with Position-Feedback Mechanism

Alessandro Nastro, Marco Ferrari 0002, Vittorio Ferrari. Electrostatic-Capacitive MEMS Stiffness Sensor with Position-Feedback Mechanism. In 2021 IEEE Sensors, Sydney, Australia, October 31 - Nov. 3, 2021. pages 1-4, IEEE, 2021. [doi]

@inproceedings{Nastro0F21,
  title = {Electrostatic-Capacitive MEMS Stiffness Sensor with Position-Feedback Mechanism},
  author = {Alessandro Nastro and Marco Ferrari 0002 and Vittorio Ferrari},
  year = {2021},
  doi = {10.1109/SENSORS47087.2021.9639705},
  url = {https://doi.org/10.1109/SENSORS47087.2021.9639705},
  researchr = {https://researchr.org/publication/Nastro0F21},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {2021 IEEE Sensors, Sydney, Australia, October 31 - Nov. 3, 2021},
  publisher = {IEEE},
  isbn = {978-1-7281-9501-8},
}