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MEMS force sensor with DDS-based position feedback and tunable sensitivity

Alessandro Nastro, Marco Ferrari 0002, Vittorio Ferrari, Alfio-lip Russo, Raffaele Ardito. MEMS force sensor with DDS-based position feedback and tunable sensitivity. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]

Authors

Alessandro Nastro

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Marco Ferrari 0002

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Vittorio Ferrari

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Alfio-lip Russo

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Raffaele Ardito

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