MEMS force sensor with DDS-based position feedback and tunable sensitivity

Alessandro Nastro, Marco Ferrari 0002, Vittorio Ferrari, Alfio-lip Russo, Raffaele Ardito. MEMS force sensor with DDS-based position feedback and tunable sensitivity. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]

@inproceedings{Nastro0FRA17,
  title = {MEMS force sensor with DDS-based position feedback and tunable sensitivity},
  author = {Alessandro Nastro and Marco Ferrari 0002 and Vittorio Ferrari and Alfio-lip Russo and Raffaele Ardito},
  year = {2017},
  doi = {10.1109/ICSENS.2017.8234151},
  url = {https://doi.org/10.1109/ICSENS.2017.8234151},
  researchr = {https://researchr.org/publication/Nastro0FRA17},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017},
  publisher = {IEEE},
  isbn = {978-1-5090-1012-7},
}