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Piezoelectric MEMS for Sensors, Actuators and Energy Harvesting

Alessandro Nastro, Marco Baù, M. Ferrari, V. Ferrari. Piezoelectric MEMS for Sensors, Actuators and Energy Harvesting. In Girolamo Di Francia, Corrado Di Natale, editors, Sensors and Microsystems - Proceedings of AISEM 2021 - In Memory of Arnaldo D'Amico, Virtual Event, 28-28 February 2021. Volume 918 of Lecture Notes in Electrical Engineering, pages 264-270, Springer, 2021. [doi]

Authors

Alessandro Nastro

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Marco Baù

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M. Ferrari

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V. Ferrari

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