Alessandro Nastro, Marco Baù, M. Ferrari, V. Ferrari. Piezoelectric MEMS for Sensors, Actuators and Energy Harvesting. In Girolamo Di Francia, Corrado Di Natale, editors, Sensors and Microsystems - Proceedings of AISEM 2021 - In Memory of Arnaldo D'Amico, Virtual Event, 28-28 February 2021. Volume 918 of Lecture Notes in Electrical Engineering, pages 264-270, Springer, 2021. [doi]
Abstract is missing.