Design of a Novel Tridimensional Silicon MEMS ThermoElectric Generator

Alessandro Nastro, Marco BaĆ¹, Marco Ferrari 0002, Francesco Foncellino, Flavio Francesco Villa, Federico Cuneo, Federica Capra, Vittorio Ferrari. Design of a Novel Tridimensional Silicon MEMS ThermoElectric Generator. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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