Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing

Nirupama Nayani, Mansooreh Mollaghasemi. Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing. In Winter Simulation Conference. pages 1017-1022, 1998. [doi]

Authors

Nirupama Nayani

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Mansooreh Mollaghasemi

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