Nirupama Nayani, Mansooreh Mollaghasemi. Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing. In Winter Simulation Conference. pages 1017-1022, 1998. [doi]
@inproceedings{NayaniM98,
title = {Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing},
author = {Nirupama Nayani and Mansooreh Mollaghasemi},
year = {1998},
url = {http://portal.acm.org/citation.cfm?id=293172.293401},
tags = {process modeling},
researchr = {https://researchr.org/publication/NayaniM98},
cites = {0},
citedby = {0},
pages = {1017-1022},
booktitle = {Winter Simulation Conference},
}