Jacek Nazdrowicz, Adam Stawinski, Andrzej Napieralski. Capacitance Deviation Caused by Mechanical Deformation of MEMS Inertial Structure. In Andrzej Napieralksi, editor, 27th International Conference on Mixed Design of Integrated Circuits and System, MIXDES 2020, Wroclaw, Poland, June 25-27, 2020. pages 151-155, IEEE, 2020. [doi]
Abstract is missing.