MEMS Gyroscope FEM Modeling and Simulation

Jacek Nazdrowicz, Michal Szermer, Adam Stawinski, Andrzej Napieralski. MEMS Gyroscope FEM Modeling and Simulation. In 25th International Conference "Mixed Design of Integrated Circuits and System", MIXDES 2018, Gdynia, Poland, June 21-23, 2018. pages 280-284, IEEE, 2018. [doi]

Abstract

Abstract is missing.