Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers - CMUT and PMUT

Haleh Nazemi, Jenitha Antony Balasingam, Siddharth Swaminathan, Kenson Ambrose, Muhammad Umair Nathani, Tara Ahmadi, Yameema Babu Lopez, Arezoo Emadi. Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers - CMUT and PMUT. Sensors, 20(7):2010, 2020. [doi]

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