Haleh Nazemi, Jenitha Antony Balasingam, Siddharth Swaminathan, Kenson Ambrose, Muhammad Umair Nathani, Tara Ahmadi, Yameema Babu Lopez, Arezoo Emadi. Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers - CMUT and PMUT. Sensors, 20(7):2010, 2020. [doi]
Abstract is missing.