A self-test on wafer level for a MEM gyroscope readout based on ΔΣ modulation

Sebastian Nessler, Maximilian Marx 0002, Yiannos Manoli. A self-test on wafer level for a MEM gyroscope readout based on ΔΣ modulation. In IEEE International Symposium on Circuits and Systems, ISCAS 2017, Baltimore, MD, USA, May 28-31, 2017. pages 1-4, IEEE, 2017. [doi]

@inproceedings{NesslerMM17,
  title = {A self-test on wafer level for a MEM gyroscope readout based on ΔΣ modulation},
  author = {Sebastian Nessler and Maximilian Marx 0002 and Yiannos Manoli},
  year = {2017},
  doi = {10.1109/ISCAS.2017.8050332},
  url = {https://doi.org/10.1109/ISCAS.2017.8050332},
  researchr = {https://researchr.org/publication/NesslerMM17},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {IEEE International Symposium on Circuits and Systems, ISCAS 2017, Baltimore, MD, USA, May 28-31, 2017},
  publisher = {IEEE},
  isbn = {978-1-4673-6853-7},
}