Plasma Preparation of the Top-Quality Phase Change Materials Based on As-Se-Te Chalcogenide System

Aleksey Nezhdanov, Leonid Mochalov, Dmitry Usanov, Mikhail Kudryashov, Alexander Logunov. Plasma Preparation of the Top-Quality Phase Change Materials Based on As-Se-Te Chalcogenide System. In 2018 20th International Conference on Transparent Optical Networks (ICTON), Bucharest, Romania, July 1-5, 2018. pages 1-4, IEEE, 2018. [doi]

Abstract

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