The roadmap for development of piezoresistive micro mechanical sensors for harsh environment applications - researchr publication authors

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Ha-Duong Ngo, Piotr Mackowiak, Niels Grabbert, Thomas Weiland, Xiaodong Hu, Martin Schneider-Ramelow, Oswin Ehrmann, Klaus-Dieter Lang. The roadmap for development of piezoresistive micro mechanical sensors for harsh environment applications. In Eleventh International Conference on Sensing Technology, ICST 2017, Sydney, Australia, December 4-6, 2017. pages 1-6, IEEE, 2017. [doi]

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