Ha-Duong Ngo, Biswajit Mukhopadhyay, Piotr Mackowiak, Kevin Kröhnert, Oswin Ehrmann, Klaus-Dieter Lang. A WSi-WSiN-Pt Metallization Scheme for Silicon Carbide-Based High Temperature Microsystems. Micromachines, 7(10):193, 2016. [doi]
Abstract is missing.