Dong Ni 0004, Yiming Lou, Panagiotis D. Christofides, Lin Sha, Sandy Lao, Jane P. Chang. A method for real-time control of thin film composition using OES and XPS. In American Control Conference, ACC 2003, Denver, CO, USA, June 4-6 2003. pages 1320-1327, IEEE, 2003. [doi]
@inproceedings{NiLCSLC03,
title = {A method for real-time control of thin film composition using OES and XPS},
author = {Dong Ni 0004 and Yiming Lou and Panagiotis D. Christofides and Lin Sha and Sandy Lao and Jane P. Chang},
year = {2003},
doi = {10.1109/ACC.2003.1239773},
url = {https://doi.org/10.1109/ACC.2003.1239773},
researchr = {https://researchr.org/publication/NiLCSLC03},
cites = {0},
citedby = {0},
pages = {1320-1327},
booktitle = {American Control Conference, ACC 2003, Denver, CO, USA, June 4-6 2003},
publisher = {IEEE},
isbn = {0-7803-7896-2},
}