Dong Ni 0004, Yiming Lou, Panagiotis D. Christofides, Lin Sha, Sandy Lao, Jane P. Chang. A method for real-time control of thin film composition using OES and XPS. In American Control Conference, ACC 2003, Denver, CO, USA, June 4-6 2003. pages 1320-1327, IEEE, 2003. [doi]
Abstract is missing.