A micro and low-cost packaging technology of high accuracy piezoresistive pressure sensors with Parylene coating - researchr publication authors

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Shaoxiao Nie, Yilong Hao, Fanrui Meng, Chenhchen Gao, Zhenchuan Yang. A micro and low-cost packaging technology of high accuracy piezoresistive pressure sensors with Parylene coating. In 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2023, Jeju Island, Korea, Republic of, May 14-17, 2023. pages 128-131, IEEE, 2023. [doi]

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