Shaoxiao Nie, Yilong Hao, Fanrui Meng, Chenhchen Gao, Zhenchuan Yang. A micro and low-cost packaging technology of high accuracy piezoresistive pressure sensors with Parylene coating. In 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2023, Jeju Island, Korea, Republic of, May 14-17, 2023. pages 128-131, IEEE, 2023. [doi]
@inproceedings{NieHMGY23,
title = {A micro and low-cost packaging technology of high accuracy piezoresistive pressure sensors with Parylene coating},
author = {Shaoxiao Nie and Yilong Hao and Fanrui Meng and Chenhchen Gao and Zhenchuan Yang},
year = {2023},
doi = {10.1109/NEMS57332.2023.10190892},
url = {https://doi.org/10.1109/NEMS57332.2023.10190892},
researchr = {https://researchr.org/publication/NieHMGY23},
cites = {0},
citedby = {0},
pages = {128-131},
booktitle = {18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2023, Jeju Island, Korea, Republic of, May 14-17, 2023},
publisher = {IEEE},
isbn = {979-8-3503-3348-0},
}