Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures

Tamotsu Nishino, Masatake Hangai, Yukihisa Yoshida, Sang-Seok Lee. Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures. IEICE Transactions, 93-C(7):1111-1118, 2010. [doi]

Authors

Tamotsu Nishino

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Masatake Hangai

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Yukihisa Yoshida

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Sang-Seok Lee

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